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It uses a special focusing geometry, allowing for the measurement of very low intensity X-ray radiation.
• Achieves very high detection efficiency through special focusing geometry • Absolute intensity calibration can be performed upon request • Compact • The crystal part is not movable • No need to replace the crystal • Spectral range can be optimized for EUV λ = 6 to 7 nm or 12 to 14 nm
It is possible to obtain information on thin film composition in real-time! A diagnostic tool for process monitoring.
"Low Angle X-ray Spectroscopy (LAXS)" is a low-angle X-ray spectroscopy method. It provides a diagnostic tool for in-situ real-time process monitoring for PLD/PED systems. It allows for real-time information on thin film composition as a complementary tool to RHEED. 【Features】 ■ It is possible to obtain real-time information on thin film composition as a complementary tool to RHEED. *For more details, please refer to the PDF document or feel free to contact us.
Detecting characteristic X-rays! An effective analytical method for obtaining elemental information in micro-regions and small foreign substances.
"Energy Dispersive X-ray Spectroscopy (EDS or EDX)" is a method that detects characteristic X-rays generated by electron beam irradiation using a detector attached to an electron microscope (SEM or TEM), allowing for the acquisition of elemental information about samples or foreign substances. When characteristic X-rays generated by irradiating a material with an electron beam enter the detector, a number of electron-hole pairs equivalent to the energy of the characteristic X-rays are produced. By measuring this number (current), it is possible to determine the energy of the characteristic X-rays, and since the energy varies by element, it is possible to investigate the elemental information of the material. [Analysis by EDS (partial)] ■ Qualitative analysis of intermetallic compounds (point analysis) - By examining which elemental characteristic X-ray energy corresponds to the characteristic X-rays in the measured spectrum, the types of elements can be investigated. ■ Semi-quantitative analysis of intermetallic compounds - By examining the intensity (count number) of each characteristic X-ray, the concentration of the contained elements can be calculated. *For more details, please refer to the PDF document or feel free to contact us.
![[TEM-EDX] Energy Dispersive X-ray Spectroscopy (TEM)](https://image.mono.ipros.com/public/product/image/eea/2000240814/IPROS3960834512466909797.jpg?w=280&h=280)
EDX is a method that measures the energy and occurrence of characteristic X-rays generated when an electron beam is irradiated onto the analysis area, allowing for elemental analysis and compositional analysis.
EDX is a method that measures the energy and occurrence of characteristic X-rays generated when an electron beam is irradiated onto the analysis target area, allowing for elemental and compositional analysis. It is also referred to as Energy Dispersive X-ray Spectroscopy (EDS). In many cases, it is attached to a SEM or TEM, and this document introduces the EDX that accompanies the TEM. - Simultaneous analysis of the entire range of elements (from B to U) is possible (detection of Be is also possible depending on the attached device). - Measurements can be made with a fine electron beam probe of 0.1 nm in diameter or smaller. - By using drift correction functionality, sub-nanometer layered films can be identified as distribution images in surface analysis. - In surface analysis, it is possible to extract spectra from arbitrary locations and display line analysis.
![[SEM-EDX] Energy Dispersive X-ray Spectroscopy (SEM)](https://image.mono.ipros.com/public/product/image/c19/387108026/IPROS3784980461565155978.jpg?w=280&h=280)
It is a method for conducting elemental analysis and compositional analysis by detecting characteristic X-rays generated by electron beam irradiation and spectrally analyzing them by energy.
EDX is a method for performing elemental and compositional analysis by detecting characteristic X-rays generated by electron beam irradiation and spectrally analyzing them by energy. It is also referred to as EDS: Energy Dispersive X-ray Spectroscopy. In many cases, it is attached to SEM or TEM, and this document will explain EDX attached to SEM. - The entire energy measurement range (from B to U) can be measured simultaneously in a short time. - It has excellent detection efficiency, allowing measurements with a low probe current. - Analysis can be easily performed without the need for pretreatment, except for special samples. - It is suitable for the analysis of unknown samples. - Measurements can be conducted in a frozen or cooled state using a cryo holder.
